A SOI-based CMOS-MEMS IR image sensor with partially released reference pixels

Author： Kwon H Suzuki K Ishii K Yagi H Honda H Atsuta M Fujiwara I Sasaki K Ogata M Ueno R Funaki H

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25028-25033

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