Author: Oliva M Michaelis D Dannberg P Józwik M Liżewski K Kujawińska M Zeitner U D
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15018-15028
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Abstract
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