Twyman–Green-type integrated laser interferometer array for parallel MEMS testing

Author: Oliva M   Michaelis D   Dannberg P   Józwik M   Liżewski K   Kujawińska M   Zeitner U D  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15018-15028

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract