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Author: Jung Joontaek Lee Wonjun Kang Woojin Hong Hyeryung Oh Inn-yeal Choi Hongsoo Jung Joontaek Jung Joontaek
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|115024-115033
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115024-115033
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