The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si

Author: Coleman P.   Harding R.   Davies G.   Tan J.   Wong-Leung J.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.18, Iss.7, 2007-07, pp. : 695-700

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Abstract