Author: Chang Chienliu Moini Azadeh Nikoozadeh Amin Apte Nikhil Zhuang Xuefeng Khuri-Yakub Butrus T
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 107002-107010
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Jung Joontaek Lee Wonjun Kang Woojin Hong Hyeryung Oh Inn-yeal Choi Hongsoo Jung Joontaek Jung Joontaek
Journal of Micromechanics and Microengineering, Vol. 25, Iss. 11, 2015-11 ,pp. :