Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

Author: Chang Chienliu   Moini Azadeh   Nikoozadeh Amin   Apte Nikhil   Zhuang Xuefeng   Khuri-Yakub Butrus T    

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 107002-107010

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