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Author: Malik Nishant Schjølberg-Henriksen Kari Poppe Erik U Taklo Maaike M V Finstad Terje G
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|3|35025-35033
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35025-35033
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Abstract
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