Metal-insulator-semiconductor capacitors with water-containing hexagonal mesoporous silica (MCM-41) dielectric and high values of capacitance per unit area

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|4|45003-45008

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.4, 2015-01, pp. : 45003-45008

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