Frequency stability of an RF oscillator with an MEMS-based encapsulated resonator

Author: Bohua Peng   Wei Luo   Jicong Zhao   Quan Yuan   Jinling Yang   Fuhua Yang  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.7, 2015-07, pp. : 74010-74014

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Abstract