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Author: Koch F Marschall F Meiser J Márkus O Faisal A Schröter T Meyer P Kunka D Last A Mohr J
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|7|75015-75020
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75015-75020
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