Author: Nazmov V Reznikova E Mohr J Saile V Vincze L Vekemans B Bohic S Somogyi A
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15020-15030
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Abstract