Design, simulation and testing of capacitive micromachined ultrasound transducer-based phospholipidic biosensor elements

Author： Sapeliauskas E   Vanagas G   Barauskas D   Mikolajunas M   Pakenas E   Pelenis D   Sergalis G   Jukna T   Virzonis D  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|7|75013-75020

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75013-75020

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