Theoretical model of an optothermal microactuator directly driven by laser beams

Author： Han Xu   Zhang Haijun   Xu Rui   Wang Shuying   Qin Chun  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|7|75012-75018

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75012-75018

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