Design and implementation of a novel conical electrode for fast anodic bonding

Author: Yang Chii-Rong   Wu Jim-Wei   Chang Long-Yin  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 105003-105010

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