Different modes of capacitively coupled radio-frequency discharge in methane

ISSN： 1063-7761

Source： Journal of Experimental and Theoretical Physics, Vol.99, Iss.4, 2004-10, pp. : 719-726

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

The electrical asymmetry effect in capacitively coupled radio-frequency discharges

By Czarnetzki U Schulze J Schüngel E Donkó Z

Plasma Sources Science and Technology, Vol. 20, Iss. 2, 2011-04 ,pp. : 24010-24024

IOP Publishing

Access to resources Recommend Favorite

Influences of electrode configurations in dual capacitively coupled radio frequency glow discharge plasma

Journal of Physics: Conference Series , Vol. 591, Iss. 1, 2015-03 ,pp. : 476-481

IOP Publishing

Access to resources Recommend Favorite

Dual-frequency capacitively coupled chlorine discharge

By Huang Shuo Gudmundsson J T

Plasma Sources Science and Technology, Vol. 24, Iss. 1, 2015-02 ,pp. : 15003-15014

IOP Publishing

Access to resources Recommend Favorite

Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system

Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 44007-44014

IOP Publishing

Access to resources Recommend Favorite

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

By Schulze J Schüngel E Donkó Z Czarnetzki U

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15017-15028

IOP Publishing

Access to resources Recommend Favorite