Structural analysis of textured silicon surfaces after ion implantation under tilted angle

Author： Krügener Jan   Bugiel Eberhard   Peibst Robby   Kiefer Fabian   Ohrdes Tobias   Brendel Rolf   Osten H Jörg  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.29, Iss.9, 2014-09, pp. : 95004-95010

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