Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

Author： Malik A M Fox O J L Alianelli L Korsunsky A M Stevens R Loader I M Wilson M C Pape I Sawhney K J S May P W

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125018-125024

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