Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections

Author： Jung Joontaek   Kim Sangwon   Lee Wonjun   Choi Hongsoo  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125037-125045

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