Self-aligned tip deinsulation of atomic layer deposited Al2O3 and parylene C coated Utah electrode array based neural interfaces

Author: Xie Xianzong   Rieth Loren   Negi Sandeep   Bhandari Rajmohan   Caldwell Ryan   Sharma Rohit   Tathireddy Prashant   Solzbacher Florian  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35003-35012

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