Ultra-fast annealing to reduce the residual stress in ultra-thin chips using flash light

Author： Jeon Eun-Beom   Park Junhong   Kim Hak-Sung  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45006-45016

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