A simple method for extracting material parameters of multilayered MEMS structures using resonance frequency measurements

Author: Sun Chao   Zhou Zai-Fa   Li Wei-Hua   Huang Qing-An  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75014-75020

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