Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas

Author： Zhang Quan-Zhi   Liu Yong-Xin   Jiang Wei   Bogaerts Annemie   Wang You-Nian  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.2, 2013-04, pp. : 25014-25021

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