A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone

Author： Homentcovschi D.   Miles R.   Loeppert P.   Zuckerwar A.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.2, 2014-02, pp. : 265-272

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