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Author: Itoh M. Ishibashi Y. Masuda A. Matsumura H.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.395, Iss.1, 2001-09, pp. : 138-141
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Abstract
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High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :
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