Analysis of surface defects in Si

Author: Colston Gerard   Myronov Maksym   Rhead Stephen   Leadley David  

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|11|114003-114008

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.11, 2015-11, pp. : 114003-114008

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