Nano-scale measurement of sub-micrometer MEMS in-plane dynamics using synchronized illumination

Author： Warnat S Forbrigger C Kujath M Hubbard T

E-ISSN： 1361-6439|25|9|95004-95014

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95004-95014

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