Author： Zhang Nan Srivastava Amit Kirwan Brendan Byrne Richard Fang Fengzhou Browne David J Gilchrist Michael D
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|9|95005-95024
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95005-95024
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