Lift-off of large-scale ultrathin nanomembranes

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|1|15011-15020

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.1, 2015-01, pp. : 15011-15020

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