Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

By Villanueva Luis Guillermo   Vazquez-Mena Oscar   Martin-Olmos Cristina   Savu Veronica   Sidler Katrin   Brugger Juergen  

Micromachines, Vol. 4, Iss. 4, 2013-10 ,pp. : 370-377

MDPI

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Fabrication of 3D nanostructures by multidirectional UV lithography and predictive structural modeling

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Journal of Micromechanics and Microengineering, Vol. 25, Iss. 2, 2015-02 ,pp. : 25017-25026

IOP Publishing

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Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography

By Xiao Jing   Song Fuchuan   Han Kijeong   Seo Sang-Woo  

Journal of Micromechanics and Microengineering, Vol. 22, Iss. 2, 2012-02 ,pp. : 25006-25010

IOP Publishing

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Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography

By Kaminaga Maho   Ishida Tadashi   Omata Toru  

Micromachines, Vol. 7, Iss. 12, 2016-12 ,pp. : 224-224

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Fabrication of carbon nanotubes field emitter arrays on the flexible substrate using reversal roller imprint lithography

By Ding Lei Yin; Hongzhong Liu; Yongsheng Shi; Xiaoning He; Yucheng  

International Journal of Nanomanufacturing, Vol. 7, Iss. 3-4, 2011-09 ,pp. : 383-390

Inderscience Publishers

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