Breakdown and reliability of p-MOS devices with stacked RPECVD oxide/nitride gate dielectric under constant voltage stress

Author: Lee Y.-M.   Wu Y.   Lucovsky G.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.44, Iss.2, 2004-02, pp. : 207-212

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