Influence of nitradation in ultra-thin oxide on the gate current degradation of N and PMOS devices

Author: Fadlallah M.   Petit C.   Meinertzhagen A.   Ghibaudo G.   Bidaud M.   Simonetti O.   Guyader F.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1433-1438

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