

Publisher: Elsevier
ISSN: 0026-2714
Source: Microelectronics Reliability, Vol.44, Iss.2, 2004-02, pp. : 183-193
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content




High-k dielectrics by UV photo-assisted chemical vapour deposition
By Fang Q. Zhang J.Y. Wang Z.M. He G. Yu J. Boyd I.W.
Microelectronic Engineering, Vol. 66, Iss. 1, 2003-04 ,pp. :



