Integrated approach to electrode and AlN depositions for bulk acoustic wave (BAW) devices

Author： Jakkaraju R. Henn G. Shearer C. Harris M. Rimmer N. Rich P.

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 566-570

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