Electrical resistivity of thin electroless Ag-W films for metallization

Author： Glickman E.E.   Bogush V.   Inberg A.   Shacham-Diamand Y.   Croitoru N.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 495-500

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