Investigations of the interface stability in HfO 2 -metal electrodes

Author： Fillot F.   Chenevier B.   Maitrejean S.   Audier M.   Chaudouet P.   Bochu B.   Senateur J.P.   Pisch A.   Mourier T.   Monchoix H.   Guillaumot B.   Passemard G.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 384-391

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