Thickness scaling issues of Ni silicide

Author: Chamirian O.   Kittl J.A.   Lauwers A.   Richard O.   van Dal M.   Maex K.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 201-208

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next