Application of atomic force microscopy to detect edge of mask contaminations that may hinder titanium silicide formation

Author: Bresolin C.   Pesaturo M.   Paruzzi P.   Soncini V.   Erbetta D.   Bigi M.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 196-200

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