Development of a thermopile infrared sensor using stacked double polycrystalline silicon layers based on the CMOS process

Author: Zhou Huchuan   Kropelnicki P.   Tsai J.M.   Lee Chengkuo  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65026-65039

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract