{311} Defect evolution in Si-implanted Si 1-x Ge x alloys

Author: Crosby R.T.   Jones K.S.   Law M.E.   Larsen A.N.   Hansen J.L.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 205-208

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