Real-time stress evolution during Si 1-x Ge x Heteroepitaxy: Dislocations, islanding, and segregation

Author: Floro J.   Chason E.   Lee S.   Twesten R.   Hwang R.   Freund L.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.9, 1997-09, pp. : 969-979

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Abstract