The effect of variation of the WF 6 flow rate on the contact resistance in the DCS-based WSi x deposition

Author: Joung Y.H.   Kim K.W.   Kang S.J.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.6, Iss.4, 2003-08, pp. : 185-191

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content