A low energy ion beam assisted deposition technique for realizing iso-type SiGe/Si hetero-interface diodes

Author: Selvakumar C.R.   Mohajerzadeh S.   Brodie D.E.   Robertson M.D.   Corbett J.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.283, Iss.1, 1996-09, pp. : 182-187

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Abstract