Strain and misfit dislocation density in finite lateral size Si 1-x Ge x films grown by selective epitaxy

Author: Hollander B.   Vescan L.   Mesters S.   Wickenhauser S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.292, Iss.1, 1997-01, pp. : 213-217

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Abstract