Porous silicon host matrix for deposition by atomic layer epitaxy

Author: Utriainen M.   Lehto S.   Niinisto L.   Ducso C.   Khanh N.Q.   Horvath Z.E.   Barsony I.   Pecz B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.297, Iss.1, 1997-04, pp. : 39-42

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Abstract