Model and computer simulation results of defect transformation and decomposition of SiN x :H films during high temperature treatment

Author： Gadiyak G.V.   Gadiyak V.G.   Kosinova M.L.   Salman E.G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.335, Iss.1, 1998-11, pp. : 19-26

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