Coplanar amorphous silicon thin film transistor fabricated by inductively-coupled plasma CVD

Author: Ki Kim S.   Il Cho S.   Jin Choi Y.   Sik Cho K.   Pietruszko S.M.   Jang J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.337, Iss.1, 1999-01, pp. : 200-202

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract