(hfac)Cu(I)(MP) (hfac=hexafluoroacetylacetonate, MP=4-methyl-1-pentene) and (hfac)Cu(I)(DMB) (DMB=3,3-dimethyl-1-butene) for the chemical vapor deposition of copper film

Author： Kang S.-W.   Han S.-H.   Rhee S.-W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.350, Iss.1, 1999-08, pp. : 10-13

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