Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)

Author： Lei Y.M. Yu Y.H. Ren C.X. Zou S.C. Chen D.H. Wong S.P. Wilson I.H.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.365, Iss.1, 2000-04, pp. : 53-57

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