Dependency of reactive magnetron-sputtered SiC film quality on the deposition parameters

Author： Mahmood A.   Muhl S.   Sansores L.E.   Andrade E.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.373, Iss.1, 2000-09, pp. : 180-183

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