Carrier activation process in As + implanted relaxed Si 1-x Ge x alloys

Author: Irisawa T.   Ueno T.   Yamaguchi S.   Nakagawa K.   Miyao M.   Shiraki Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 203-206

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Abstract