Crystallization effects in oxygen annealed Ta 2 O 5 thin films on Si

Author: Dimitrova T.   Arshak K.   Atanassova E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.381, Iss.1, 2001-01, pp. : 31-38

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Abstract